Mmụba ngwa ngwa na ngalaba ozi na optoelectronics akwalitela mmelite na-aga n'ihu nke teknụzụ teknụzụ kemịkalụ polishing (CMP).Na mgbakwunye na ngwá ọrụ na ihe, inweta nke ultra-elu-nkenke na-ebupụta bụ dabere na imewe na mmepụta mmepụta nke elu-arụmọrụ abrasive ahụ, yana nkwadebe nke kwekọrọ ekwekọ polishing slurry.Na na-aga n'ihu na nkwalite nke n'elu nhazi ziri ezi na arụmọrụ chọrọ, ihe a chọrọ maka elu-arụmọrụ polishing ihe na-na-elu na elu.A na-eji cerium dioxide mee ihe n'ọtụtụ ebe n'ime nhazi nke ọma nke ngwaọrụ microelectronic na nkenke ngwa anya.
Cerium oxide polishing powder (VK-Ce01) ntụ ntụ nwere uru nke ike ịcha ike, arụmọrụ dị elu, ezigbo polishing ziri ezi, àgwà ọma dị mma, ebe ọrụ dị ọcha, mmetọ dị ala, ogologo ndụ ọrụ, wdg, na-eji ya eme ihe na ya. ngwa anya nkenke polishing na CMP, wdg ubi nwere ọnọdụ dị oke mkpa.
Njirimara bụ isi nke cerium oxide:
Ceria, nke a makwaara dị ka cerium oxide, bụ oxide nke cerium.N'oge a, valence nke cerium bụ +4, na usoro kemịkalụ bụ CeO2.Ngwaahịa ahụ dị ọcha bụ ntụ ntụ dị arọ na-acha ọcha ma ọ bụ kristal cubic, ngwaahịa adịghị ọcha na-acha odo odo ma ọ bụ ọbụna pink na ntụ ntụ na-acha ọbara ọbara (n'ihi na o nwere ọnụọgụ lanthanum, praseodymium, wdg).N'ime ụlọ okpomọkụ na nrụgide, ceria bụ oxide siri ike nke cerium.Cerium nwekwara ike na-etolite +3 valence Ce2O3, nke na-adịghị akwụsi ike na ga-etolite CeO2 kwụsiri ike na O2.Cerium oxide na-agbaze ntakịrị na mmiri, alkali na acid.Njupụta bụ 7.132 g / cm3, na-agbaze ebe bụ 2600 ℃, na esi ebe bụ 3500 ℃.
Usoro nhazi nke cerium oxide
Isi ike nke CeO2 ahụ adịghị elu.Dị ka e gosiri na tebụl dị n'okpuru ebe a, ike nke cerium oxide dị nnọọ ala karịa nke diamond na aluminum oxide, ma dịkwa ala karịa nke zirconium oxide na silicon oxide, nke kwekọrọ na ferric oxide.Ya mere, ọ gaghị ekwe omume na teknụzụ iji kpochapụ ihe ndị dabeere na silicon oxide, dị ka iko silicate, iko quartz, wdg, na ceria nwere ike siri ike site n'echiche naanị.Agbanyeghị, cerium oxide bụ ntụ ntụ polishing kacha amasị ugbu a maka ịchacha ihe ndị dabere na silicon oxide ma ọ bụ ọbụna ihe silicon nitride.Enwere ike ịhụ na cerium oxide polishing nwekwara mmetụta ndị ọzọ ma e wezụga mmetụta arụ ọrụ.Isi ike nke diamond, bụ nke a na-ejikarị egweri na ihe na-egbuke egbuke, na-enwekarị ohere ikuku oxygen na CeO2 lattice, nke na-agbanwe ọdịdị anụ ahụ na kemịkal ya ma nwee mmetụta ụfọdụ na njirimara polishing.Uzuzu cerium oxide nke a na-ejikarị eme ihe nwere ụfọdụ oxides ụwa ndị ọzọ na-adịghị ahụkebe.Praseodymium oxide (Pr6O11) nwekwara ihe owuwu cubic lattice gbadoro ụkwụ na ihu, nke dabara adaba maka polishing, ebe ndị ọzọ lanthanide obere ụwa oxides enweghị ike polishing.Na-enweghị ịgbanwe kristal Ọdịdị nke CeO2, ọ nwere ike na-etolite a siri ike ngwọta na ya n'ime a ụfọdụ nso.Maka ntụ ntụ nano-cerium oxide polishing nano-cerium oxide dị elu (VK-Ce01), ịdị ọcha dị elu nke cerium oxide (VK-Ce01), ka ikike polishing dị ukwuu na ndụ ogologo ndụ, ọkachasị maka iko siri ike na oghere anya quartz maka oghere anya. Otee aka.Mgbe cyclic polishing, ọ bụ ihe amamihe na-eji elu-ọcha cerium oxide polishing ntụ ntụ (VK-Ce01).
Ngwa nke cerium oxide ntụ ntụ:
Cerium oxide polishing powder (VK-Ce01), nke a na-ejikarị eme ihe maka ngwaahịa iko, a na-ejikarị ya na mpaghara ndị a:
1. Iko, iko oghere polishing;
2. Igwe anya anya, oghere anya, oghere, wdg;
3. Igwefoto ihuenyo ekwentị mkpanaaka, nche elu (ọnụ ụzọ nche), wdg;
4. LCD nyochaa ụdị niile nke LCD ihuenyo;
5. Rhinestones, diamond na-ekpo ọkụ (kaadị, diamond na jeans), bọọlụ ọkụ ( chandeliers okomoko na nnukwu ọnụ ụlọ);
6. Nkà kristal;
7. polishing nke jed
Ihe nrụpụta cerium oxide dị ugbu a:
A na-eji aluminom mee elu cerium oxide iji meziwanye nchacha nke enyo anya ya.
Ngalaba nyocha teknụzụ na mmepe nke UrbanMines Tech.Oke, tụrụ aro na compounding na elu mgbanwe nke polishing ahụ bụ isi ụzọ na-eru nso iji melite arụmọrụ na izi ezi nke CMP polishing.N'ihi na urughuru Njirimara nwere ike na-ekiri site compounding nke multi-component ọcha, na dispersion kwụsie ike na polishing arụmọrụ nke polishing slurry nwere ike mma site n'elu mgbanwe.Nkwadebe na polishing arụmọrụ nke CeO2 ntụ ntụ doped na TiO2 nwere ike melite polishing arụmọrụ karịa 50%, na n'otu oge ahụ, n'elu ntụpọ na-ebelata site 80%.Mmetụta polishing synergistic nke CeO2 ZrO2 na SiO2 2CeO2 mejupụtara oxides;ya mere, teknụzụ nkwadebe nke doped ceria micro-nano composite oxides bụ ihe dị oke mkpa maka mmepe nke ihe ọhụrụ polishing na mkparịta ụka nke polishing usoro.Na mgbakwunye na ego doping, steeti na nkesa nke dopant na synthesized ahụ na-emetụtakwa ihe ndị dị n'elu ha na ịrụ ọrụ polishing.
N'ime ha, njikọ nke polishing ahụ na ihe mkpuchi mkpuchi na-adọrọ mmasị karị.Ya mere, nhọrọ nke usoro synthetic na ọnọdụ dịkwa oke mkpa, karịsịa ụzọ ndị ahụ dị mfe ma dị ọnụ ala.N'iji cerium carbonate hydrated dị ka isi akụrụngwa, aluminom-doped cerium oxide polishing particles bụ usoro mechanochemical mmiri siri ike-phase mebere.N'okpuru ọrụ nke ike arụ ọrụ, nnukwu akụkụ nke cerium carbonate hydrated nwere ike ịkewaa n'ime ihe ndị dị mma, ebe aluminom nitrate na-emeghachi na mmiri amonia iji mepụta ụmụ irighiri ihe colloidal amorphous.The colloidal particles na-adị mfe mmasị na cerium carbonate particles, na mgbe ihicha na calcination, aluminum doping nwere ike nweta n'elu nke cerium oxide.A na-eji usoro a mee ka akụkụ cerium oxide dị iche iche nke aluminom doping na-arụ ọrụ, na-egosipụtakwa ọrụ polishing ha.Mgbe agbakwunyere ihe kwesịrị ekwesị nke aluminom n'elu akụkụ nke cerium oxide, uru na-adịghị mma nke ike elu ga-abawanye, nke mere ka ọdịiche dị n'etiti ihe ndị na-egbuke egbuke.Enwere mgbagha electrostatic siri ike, nke na-akwalite nkwalite nkwụsi ike nkwusioru abrasive.N'otu oge ahụ, a ga-ewusikwa mgbasa ozi mmekọrịta dị n'etiti ihe ndị na-egbuke egbuke na akwa oyi akwa a na-akwụ ụgwọ nke ọma site na mmasị Coulomb, nke bara uru na kọntaktị dị n'etiti abrasive na oyi akwa dị nro n'elu nke iko a na-egbuke egbuke, ma na-akwalite. mmelite nke polishing ọnụego.